Ellipsometrical studies on the AurSi 111 system

نویسندگان

  • K. Mummler
  • P. Wissmann
چکیده

Ž . An experimental arrangement is described which allows the deposition of thin gold films on Si 111 single-crystals and the in situ optical characterization at various temperatures, thicknesses, and angles of incidence of the light. The optical analysis is performed with the help of a highly sensitive spectroscopic ellipsometer operating in the wavelength range 400–900 nm. Additional structure information is obtained from REM, LEEDrAuger, X-ray and resistivity measurements. The gold films exhibit a homogeneous single-crystal structure after deposition at room temperature. With increasing annealing temperature the films crack and form an island-shaped eutectic AurSi melt, cooling leads to a decomposition of the binary mixture and formation of gold islands embedded in the silicon surface. The eutectic temperature is found to be smaller than in bulk samples with a marked hysteresis in the D or c vs. T curves. The wavelength dependence of c shows, in addition to the well-known interband transition of gold, a resonance at about 570 nm. It can be traced back to a Mie plasmon excitation in the solid gold islands which disappears in the liquid state. q 1998 Elsevier Science S.A. Ž .

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تاریخ انتشار 1998